MUMBAI, India, Oct. 31 -- Intellectual Property India has published a patent application (202517093249 A) filed by Board Of Regents, The University Of Texas System, Austin, U.S.A., on Sept. 29, for 'designs of nano-precise short stroke stages for actuation.'
Inventor(s) include Sreenivasan, Sidlgata, V.; Shah, Jay; and Ajay, Paras.
The application for the patent was published on Oct. 31, under issue no. 44/2025.
According to the abstract released by the Intellectual Property India: "A system for aligning four or more dies with respect to a substrate. The system includes four or more stage modules utilized to enable the aligning of the four or more dies with respect to the substrate. The aligning is performed with sub-50 nm alignment precision, where the four or more stage modules are actuated along the X, Y, and/or ?z directions. The motion along the Z, ?x, and/or 0Y directions is supported actively or passively, where the passive supporting is enabled by flexures and/or a liquid film. Furthermore, actuation is enabled by piezoelectric and/or electromagnetic methods."
The patent application was internationally filed on Mar. 01, 2024, under International application No.PCT/US2024/018093.
Disclaimer: Curated by HT Syndication.
