MUMBAI, India, July 24 -- Intellectual Property India has published a patent application (202647086023 A) filed by Asml Netherlands B. V. on July 14, 2026, for Charged Particle-Optical Module, Charged Particle-Optical Device, And A Method Of Using A Charged-Particle Apparatus.
Inventor includes Mangnus, Albertus, Victor, Gerardus.
The application for the patent was published on July 17, 2026, under issue no. 29/2026.
Abstract: A charged particle-optical module for generating a plurality of sub-beams 211-213 from a source beam 202 of electrons, the module for use in an charged particle-optical device for projecting a plurality of sub-beams 211-213 toward a sample. The charged particle module comprises: an electron source 201 comprising an emitter 63 configured to emit a source beam 202 along a divergent path; a beam limiter 236 defining an array of apertures 232 and positioned in the divergent path to form a grid of sub-beams from the source beam; a condenser lens array 231 configured to operate on the sub-beams; and a macro-corrector system 60 configured to act on the sub-beams. The macro-corrector system is at least partly comprised between the beam limiter and the condenser lens array.
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