MUMBAI, India, July 13 -- Intellectual Property India has published a patent application (202617071514 A) filed by Tokyo Electron Limited on June 09, 2026, for Monitoring System, Monitoring Method, Monitoring Device, And Detection Tape.
Inventors include Akada, Hikaru; and Ogami, Takayuki.
The application for the patent was published on July 10, 2026, under issue no. 28/2026.
Abstract: A monitoring system for monitoring the periphery of a substrate processing apparatus installed in a clean room, the monitoring system including a detection tape which is disposed on the upper surface of floor tiles in a part or all of the periphery of the substrate processing apparatus so as to extend across a plurality of the floor tiles, the detection tape including a conductive layer disposed along the longitudinal direction of the tape, the monitoring system further comprising an alarm unit that issues an alarm when an electrically conductive state in the conductive layer is blocked or the voltage of a signal current flowing through the conductive layer falls below a predetermined threshold.
Disclaimer: Curated by HT Syndication.
