MUMBAI, India, July 13 -- Intellectual Property India has published a patent application (202527093389 A) filed by Suzhou Maxwell Technologies Co. , Ltd.; and Suzhou Maizheng Technology Co. , Ltd. on September 29, 2025, for Radio Frequency Feed Structure And Pecvd Device Having Same.
Inventors include Qu, Qingyuan; Wang, Fengming; Gao, Lei; Zhang, Heng; and Han, Shaowen Number.
The application for the patent was published on July 10, 2026, under issue no. 28/2026.
Abstract: The present application relates to the field of chemical vapor deposition, and discloses a radio frequency feed structure and a PECVD device have same. The radio frequency feed structure is used for a PECVD device. The radio frequency feed structure comprises: at least one first connecting piece, wherein a first end of the first connecting piece is connected to a radio frequency power supply system; a mounting disc, wherein the mounting disc is provided with mounting holes, the mounting holes extend in a first direction, and a second end of the first connecting piece is connected to the mounting holes; and second connecting pieces, wherein there are multiple second connecting pieces, first ends of the second connecting pieces are connected to the mounting holes, the first ends of the second connecting pieces are suitable for moving in the first direction along the mounting holes, and second ends of the second connecting pieces are used for being electrically connected to an electrode in a reaction chamber of the PECVD device. The present application can achieve a multi-point feed mode, is beneficial to improving the uniformity of potential distribution, and can mitigate the problem that installation, disassembly and adjustment are not convenient in a current multi-point fixed feed mode.
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