MUMBAI, India, June 24 -- Intellectual Property India has published a patent application (202617060461 A) filed by Bht Services Pte. Ltd. on May 12, 2026, for Reactor For Treating Gaseous Pollutants, And Head Assembly Thereof.
Inventor includes Chan, Chee Wei.
The application for the patent was published on June 12, 2026, under issue no. 24/2026.
Abstract: A head assembly, comprising an upper cover assembly, one or more plasma modules, and one or more guide pipe assemblies, wherein the upper cover assembly is provided above a plasma reaction area; the upper cover assembly comprises a top plate and a bottom plate; an area for accommodating a cooling fluid is defined between the top plate and the bottom plate; the bottom plate comprises one or more openings; the plasma module is connected to the plasma reaction area by means of the openings; the plasma module comprises a microwave source that generates a microwave oscillation, a waveguide assembly, and a resonant cavity; the microwave oscillation reacts with a reactive gas; and the guide pipe assembly is configured to guide to the plasma reaction area an effluent from a semiconductor process.
Disclaimer: Curated by HT Syndication.
