MUMBAI, India, Aug. 17 -- Intellectual Property India has published a patent application (202647096859 A) filed by Entegris, Inc. on August 11, 2026, for Systems For Delivering Precursors And Related Methods.
Inventors include Hendrix, Bryan C.; Henderson, Lucas B.; Battle, Scott L.; and Popa, Florentina.
The application for the patent was published on August 14, 2026, under issue no. 33/2026.
Abstract: Systems for delivering precursors and related methods are provided. A system comprises at least one first container, at least one second container, at least one deposition chamber, a first conduit connecting the at least one first container to the at least one second container, and a second conduit connecting the at least one second container to the at least one deposition chamber. The first conduit is configured for delivering a vaporized precursor, at a first temperature, from the at least one first container to the at least one second container. The second conduit is configured for delivering the vaporized precursor, at a second temperature, from the at least one second container to the at least one deposition chamber. The first temperature is less than the second temperature.
Disclaimer: Curated by HT Syndication.
